Friction and Wear Characteristics in Air of Molybdenum Disulfide Sputtered Films Introduced Dry Air to Vacuum Chamber after Sputtering

摘要

It is known that MoS_2 sputtered film is a solid lubricant having high tribological characteristics in vacuum. However, the wear life of the MoS_2 film decreases by the existence of water vapor in operating atmosphere and is influenced by the storage conditions in air atmosphere before operating. The objective of this study is to propose a method to bring longer wear life and lower friction coefficient of sputtered MoS_2 film by preventing the invasion of water vapor into the MoS_2 film in air atmosphere.