We present two-dimensional SPICE model for a comb-drive actuator expressing dependent source elements that are used for energy transfer parts between mechanical and electrical systems as shown in Fig.1. In order to simulate MEMS devices such as a gyro sensor in which two-dimensional motions of mechanical system are mutually combined, conventional one-degree of freedom models cannot be applied for the numerical simulation since a vibration of comb-drive actuator in multi-degree of freedom system has an interaction between vibrations in each direction. Therefore, a comb-drive equivalent circuit model in multi-degree of freedom system expressing mutual interaction including electro-mechanical energy transfer is required.
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