Recent activities in the development of microelectromechanicai systems in Singapore

摘要

Silicon microelectromechanicai systems (MEMS) R&D activity in Singapore started in 1993 at Institute of Microelectronics (IME), a public-funded research institute under the then National Science and Technology Board (NSTB), which became the Agency for Science, Technology & Research (A STAR) in 2002. Since then the R&D on micromachining, micro-sensors and other MEMS devices had grown rapidly in Singapore with IME playing a significant role with its joint research programs with multinational companies and universities. The research focus then was on physical MEMS such as accelerometer, pressure sensor, microphone, etc. Since year 2000 the focus has shifted toward BioMEMS and Optical MEMS. IME led biofluidic engineering prototypes developments, with universities complementing bio-applications for micro-PCR, DNA/ RNA extraction, patch clamp, and electro-biochemical sensors. More recently, IME also led joint developments with multinational companies such as small foot print accelerometer for in-vivo/ex-vivo (biomedical) motion analysis, MEMS optical probe (integrated MEMS - Packaging - Optics) for cancer diagnostics, micromirror for projection display, and silicon photonics integrated modules. There has been significant demand for research and development on vertically integrated solutions, a key strength of IME, where concept to prototyping - solid model design, process integration design, fabrication in 8 inch silicon process line, characterization, MEMS packaging, and application specific integrated circuit (ASIC) can be realized at IME labs. In an effort to support MEMS industry, low volume pilot production, which is crucial for early phase commercialization, has also been carried out at IME. Through these research programs, IME has developed a 3-party collaboration R&D foundry business model, whereby IME is the R&D partner to its customers with manufacturing support from a local commercial foundry partner. This model allows IME's customers to significantly reduce time to market for their products.