The squeeze-film air damping effect on micro airflow angular rate sensor is analyzed based on Possioivs equation. It's numerical derivation is implemented by means of the method of separation variables. And the actuated membrane vibration mode are simulated using MATLAB. The results indicate that the Bessel function J_|m|. is the eigenfunction, when m=0, the actuating efficiency of vibration memrane is higher than that of odd number m.
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机译：基于PossioIVS方程，分析了对微气流角速率传感器的挤压膜空气阻尼效果。它的数值推导是通过分离变量的方法实现的。使用MATLAB模拟致动膜振动模式。结果表明贝塞尔函数J_ | M |。是特征函数，当m = 0时，振动膜的致动效率高于奇数m的致动效率。
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