An Optical Pressure Biosensor Based on MEMS

摘要

An optical fiber pressure sensor has been developed for the measurement in human body. The sensing element consists of a membrane structure, which is fabricated by micromachining. The fabrication process includes anisotropic wet etching on the silicon wafer. For the transmitting source and signal light, a multimode optical fiber 50/125um (core/clad) in diameter has been used. A Fabry -Perot Interferometer is constituted of a lens at the end of the fiber and a reflection Au membrane on the top of the sensing element. The intensity of the light reflected at the membrane is modulated by the pressure. The deflection of the membrane by applied pressure can be mathematically described.