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Development of Stable Baths for Electroplating CoFe and CoFeNi Soft Magnetic Thin Films

机译:用于电镀CoFe和辛烯软磁薄膜的稳定浴缸的研制

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Conventional low pH (2.3-3.5) baths, for the electrodeposition of CoFe and CoFeNi thin films, suffer from stability problems. In addition, voids can form in the deposits due to the electroplating of hydrogen. New, more stable baths with relatively high pH levels have been developed by introducing a stabilizer. The effects of stabilizer dosage, bath Co/Fe concentration ratios and plating temperature on the deposition of CoFe and CoFeNi thin films have been investigated. CoFe and CoFeNi thin films with good magnetic properties have been plated out from the newly developed plating baths.
机译:常规低pH(2.3-3.5)浴,用于CoFe和辛烯薄膜的电沉积,遭受稳定性问题。另外,由于氢的电镀,空隙可以在沉积物中形成。通过引入稳定剂开发了具有相对较高的pH水平的新的,更稳定的浴室。研究了稳定剂剂量,浴CO / Fe浓度比和电镀温度对CoFe和辛烯薄膜沉积的影响。具有良好磁性的CoFe和Cofeni薄膜已经从新开发的电镀浴中镀出。

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