A Kind of Shock Resistance Method on Silicon Micro- Machined Gyroscope *

摘要

This paper reported a silicon micro-machined gyroscope that is driven by the rotating carrier’s angular velocity; this gyroscope was manufactured by micro-electronic fabrication and bulk Si etching technology Using electrode position restricting, resin packing, “sandwich” structure and latex flake, the shock resistance of gyroscope can reach 5000g. The measured results showed that the gyroscope has good consistency and repetitiousness.