Systems and methods for shock resistance of a mems - gyroscope

摘要

Various embodiments of the invention permit increased impact strength in the case of gyroscopes. In certain embodiments, insensitivity against undesired forces, which the signal output perish, by means of a checkerboard pattern - architecture of proof masses is created, which provides a second layer of differential signals, which are not present in the case of existing developments. The masses are parallel to one another in a two - times - two - arrangement with two orthogonal axes of symmetry oriented. The masses are driven to oscillate in such a way that each mass is moved in parallel opposition to an adjacent proof mass. In some embodiments of the present invention combines a mechanical connection element system the proof masses with one another, in order to suppress deflections due to mechanical disturbances and at the same time, deflections to allow the basis of coriolis forces, in order to prevent incorrect sensor signals.