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Verification of performance of super nano-cleanroom Part 1 Control of ultra low humidity and property of chemical clean

机译:超纳米洁净室的性能验证超低湿度和化学清洁性能的控制

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摘要

The new cleanroom laboratory which purposes to research and develop advanced clean technology is completed on March 2007 in Institute of technology, Shimizu corporation. The laboratory furnishes the super nano-cleanroom (SNCR) which can control ultra low humidity also reduce airborne molecular contaminants to nano-lebel concentration. We verified performances of SNCR. As a result, the humidity in SNCR is attained to dew point temperature of -40 degree which is target after 150 hours from start operating of dehumidifier. In addition, the concentration of airborne molecular contaminants in SNCR is also attained to 1 ng/m~3 or below which is target.
机译:新的洁净室实验室目的在于2007年3月在Shimizu Corporation的技术研究所完成了先进的清洁技术。该实验室提供了可控制超低湿度的超级纳米洁净室(SNCR),也将空气中的分子污染物降低到纳米叶氏浓度。我们验证了SNCR的表演。结果,SNCR中的湿度达到-40度的露点温度,从开始操作除湿器150小时后靶向。此外,SNCR中的空气传播分子污染物的浓度也达到1ng / m〜3或以下,其是靶标。

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