Development of one fluid nozzle humidifying using time proportional controlling method

摘要

The compressed air atomizers (two fluid nozzles) are being widely used as the energy-saving humidification system in big-scale cleanrooms producing semiconductor or FPD (Flat Panel Display). The atomizers have prominent performances at the point of spraying many fine particles and controlling the volume of water with wide range. Meanwhile, the atomizers consume much compressed air, so it is difficult to pick up the required volume of air from conventional factory line. But recently one fluid nozzle using only water with high pressure from 6 to 7 MPa, not using compressed air, are developed to solve heat island effects in large cities. The SMD (Sauter Mean Diameter) of droplets of one fluid nozzles is as fine as that of compressed air atomizers, and the running costs of one fluid nozzles is 1/30 or less than that of the atomizers. In the paper, we have found out the characteristics of the one fluid nozzles and developed the controlling method suiting the nozzles' characteristics.