Chip size as a function of field fill on wafer layouts, and their effect on thruput, has been well understood as a loss of both opportunity and cost of operation (COO), as a function of depreciated capital expense. The resultant effects on consumable replacement time, expense and budgeting has not been as clear-cut. This paper will outline the consequences that field till has with respect to increased laser, and litho tool optic train, consumable usages as well as availability detractors to replace these components. Resulting losses due to increased cost of operation, and additional consumable spending and usages will be explored.
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