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Society of Photo-Optical Instrumentation Engineers Conference on Cost and Performance in Integrated Circuit Creation

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1.Technology Acceleration ― The Change in Industry Requirements

机译：技术加速 - 行业要求的变化
- 作者：Walter J. Trybulaauthor_name/;SPIE-The International Society for Optical Engineering
- 会议名称：《Society of Photo-Optical Instrumentation Engineers Conference on Cost and Performance in Integrated Circuit Creation》 | 2003年
- technology acceleration;
- ROI;
- IROI;
- life cycle analysis;
- cost effective technology;
- ramp acceleration;
2.Does Technology Acceleration Equate to Mask Cost Acceleration?

机译：技术加速度是否等同于掩码成本加速？
- 作者：Walter J. Trybula;Brian Grenon;SPIE-The International Society for Optical Engineering
- 会议名称：《Society of Photo-Optical Instrumentation Engineers Conference on Cost and Performance in Integrated Circuit Creation》 | 2003年
- technology acceleration;
- mask cost;
- mask yield;
- mask requirements;
3.Technology Acceleration: The Suppliers' Challenge

机译：技术加速：供应商挑战
- 作者：Walter J. Trybulaauthor_name/;SPIE-The International Society for Optical Engineering
- 会议名称：《Society of Photo-Optical Instrumentation Engineers Conference on Cost and Performance in Integrated Circuit Creation》 | 2003年
- technology acceleration;
- ROI;
- IROI;
- life cycle analysis;
- cost effective technology;
- ramp acceleration;
4.Effects of grid-placed contacts on circuit performance

机译：网格置位接触对电路性能的影响
- 作者：Jun Wang;Alfred K. Wong;SPIE-The International Society for Optical Engineering
- 会议名称：《Society of Photo-Optical Instrumentation Engineers Conference on Cost and Performance in Integrated Circuit Creation》 | 2003年
- resolution enhancement techniques;
- grid-placed contacts;
- standard cells;
- double exposure;
- critical dimension;
- process-related factor;
5.DIVAS: An Integrated Networked System for Mask Defect Dispositioning and Defect Management

机译：DIVAS：用于掩模缺陷配置和缺陷管理的集成网络系统
- 作者：Saghir Munir;Dan Bald;Vikram Tolani;Firoz Ghadiali;SPIE-The International Society for Optical Engineering
- 会议名称：《Society of Photo-Optical Instrumentation Engineers Conference on Cost and Performance in Integrated Circuit Creation》 | 2003年
- automated dispositioning;
- defect management;
- simulation;
- DIVAS;
- callas;
- primadonna;
6.Improving IC Process Efficiency With Critical Materials Management

机译：通过关键材料管理提高IC工艺效率
- 作者：Kathy L. Hanson;Robert E. Andrews;SPIE-The International Society for Optical Engineering
- 会议名称：《Society of Photo-Optical Instrumentation Engineers Conference on Cost and Performance in Integrated Circuit Creation》 | 2003年
- consumable;
- management;
- chemical;
- RFID;
- cost of ownership;
- photoresist;
- expiration;
- process;
- efficiency;
- materials;
7.Electrical Validation of Resolution Enhancement Techniques

机译：分辨率增强技术的电气验证
- 作者：Kunal N. Taravade;Neal P. Callan;Ebo Croffie;Aftab Ahmed;SPIE-The International Society for Optical Engineering
- 会议名称：《Society of Photo-Optical Instrumentation Engineers Conference on Cost and Performance in Integrated Circuit Creation》 | 2003年
8.Value-based Management of Design Reuse

机译：基于价值的设计重用管理
- 作者：Juan Antonio Carballo;David L. Cohn;Wendy Belluomini;Robert K. Montoye;SPIE-The International Society for Optical Engineering
- 会议名称：《Society of Photo-Optical Instrumentation Engineers Conference on Cost and Performance in Integrated Circuit Creation》 | 2003年
- reuse;
- cost;
- value;
- management;
- reward;
- electronic;
- design;
- automatic;
- return;
- economic;
9.Practical Quality Metrics for Resolution Enhancement Software

机译：分辨率增强软件的实用质量指标
- 作者：Robert Boone;Kevin Lucas;Raphael Wynd;Mike Boatright;Matt Thompson;Al Reich;SPIE-The International Society for Optical Engineering
- 会议名称：《Society of Photo-Optical Instrumentation Engineers Conference on Cost and Performance in Integrated Circuit Creation》 | 2003年
10.Cost effective strategies for ASIC masks

机译：ASIC面具的成本效益策略
- 作者：Dipankar Pramanik;Henry Kamberian;Christopher Progler;Michael Sanie;David Pinto;SPIE-The International Society for Optical Engineering
- 会议名称：《Society of Photo-Optical Instrumentation Engineers Conference on Cost and Performance in Integrated Circuit Creation》 | 2003年
11.Mask cost tradeoffs for sub-100-nm technologies

机译：用于子100-NM Technologies的面具成本权衡
- 作者：Artur P. Balasinski
- 会议名称：《Society of Photo-Optical Instrumentation Engineers Conference on Cost and Performance in Integrated Circuit Creation》 | 2003年
- masks;
- sub-100 nm process;
- integrated simulation;
- device impact;
12.Cost effective lithography approaches for ASIC circuits

机译：ASIC电路的成本效益光刻方法
- 作者：Dipankar Pramanik;Henry H. Kamberian;Christopher J. Progler;Michael Sanie;David Pinto
- 会议名称：《Society of Photo-Optical Instrumentation Engineers Conference on Cost and Performance in Integrated Circuit Creation》 | 2003年
13.Mask Cost for Sub-100 nm Technologies: Stopping A Runaway?

机译：Sub-100 NM Technologies的面具成本：停止失控？
- 作者：Artur Balasinskiauthor_name/;SPIE-The International Society for Optical Engineering
- 会议名称：《Society of Photo-Optical Instrumentation Engineers Conference on Cost and Performance in Integrated Circuit Creation》 | 2003年
- masks;
- sub-100 nm process;
- integrated simulation;
- device impact;
14.Toward performance-driven reduction of the cost of RET-based lithography control

机译：朝着性能驱动的降低RET的光刻控制成本
- 作者：Puneet Gupta;Andrew B. Kahng;Dennis Sylvester;Jie Yang;SPIE-The International Society for Optical Engineering
- 会议名称：《Society of Photo-Optical Instrumentation Engineers Conference on Cost and Performance in Integrated Circuit Creation》 | 2003年
- OPC;
- RET;
- variability;
- correction;
15.Multiproject wafers: not just for million-dollar mask sets

机译：多项目晶片：不仅仅是百万美元的蒙面套装
- 作者：Richard D. Morseauthor_name/;SPIE-The International Society for Optical Engineering
- 会议名称：《Society of Photo-Optical Instrumentation Engineers Conference on Cost and Performance in Integrated Circuit Creation》 | 2003年
- MPW;
- multiproject wafers;
- MPC;
- data management;
- tapeout;
- chip-finishing;
- frame generation;
- data prep;
- mask engineering;
- cost reduction;
- prototype;
- semiconductor;
- lithography;
16.Microeconomics or Yield Learning in semiconductor Manufacturing

机译：半导体制造中的微观经济学或屈服学习
- 作者：Kevin M. Monahanauthor_name/;SPIE-The International Society for Optical Engineering
- 会议名称：《Society of Photo-Optical Instrumentation Engineers Conference on Cost and Performance in Integrated Circuit Creation》 | 2003年
17.Microeconomics of yield learning and process control in semiconductor manufacturing

机译：半导体制造中产量学习和过程控制的微观经济学
- 作者：Kevin M. Monahan
- 会议名称：《Society of Photo-Optical Instrumentation Engineers Conference on Cost and Performance in Integrated Circuit Creation》 | 2003年
18.Microeconomics of Process Control in Semiconductor Manufacturing

机译：半导体制造过程中的微观经济学
- 作者：Kevin M. Monahanauthor_name/;SPIE-The International Society for Optical Engineering
- 会议名称：《Society of Photo-Optical Instrumentation Engineers Conference on Cost and Performance in Integrated Circuit Creation》 | 2003年
- 300mm wafers;
- 90nm design rules;
- profitability;
- economics;
- ARC;
- AEC;
- PWM;
19.Silicon Economics

机译：硅经济学
- 作者：J.Hogan;A.Chatila;B.Bruggeman;V.Boksha;SPIE-The International Society for Optical Engineering
- 会议名称：《Society of Photo-Optical Instrumentation Engineers Conference on Cost and Performance in Integrated Circuit Creation》 | 2003年
20.Understanding the Operating Expense Relationships of Layouts on Excimer Photo Tools

机译：了解在准分子照片工具上布局的运营费用关系
- 作者：Dennis B. Amesauthor_name/;SPIE-The International Society for Optical Engineering
- 会议名称：《Society of Photo-Optical Instrumentation Engineers Conference on Cost and Performance in Integrated Circuit Creation》 | 2003年