Plasma enhanced chemical vapor deposition of high refractive index polymer films

摘要

The refractive index is a key characteristic of polymer materials in optical applications. For organic polymers, typical refractive indices are in the range of 1.35 to 1.65. Extending the refractive index beyondthe limits is of fundamental scientific interest and would enhance the utility of polymers in manyapplications. Polymeric thin films fabricated by plasma enhanced chemical vapor deposition (PECVD)have been investigated in the fields of electronics and optics and their utility is becoming more widespreadin a variety of applications. Outstanding attributes of the PECVD photonic films include a smooth surface,dense crosslinking structure, robustness, environmental resistance, optical transparency in either visible orIR regions, and good adhesion to many optical window and substrate materials. In recent years, ourlaboratory has fabricated novel polymer optical coatings and films by PECVD. One focus of this researchhas been to expand the achievable maximum refractive index. This goal has been sought using twoapproaches including increasing the conjugation and crosslinking of chemical moieties of the bulk film andincorporation of metal ions into the structure. The techniques of XPS, FTIR, HRSEM, and ellipsometrywere used to characterize both the optical properties and the chemical structure of plasma polymerizedbenzene, ferrocene, and metal-phthalocyanine thin films. The structure-property relationship and the effectof PECVD processing conditions are also discussed in this presentation.