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Mass Transport Characteristics in a Pulsed Plasma Enhanced Chemical Vapor Deposition Reactor for Thin Polymer Film Deposition

机译：脉冲等离子体增强化学气相沉积反应器中用于聚合物薄膜沉积的传质特性

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作者
Kumud O. Goyal; R. Mahalingam; Patrick D. Pedrow; Senior Member; Mohamed A. Osman;
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年度 2008
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1. Vapor deposition polymerization of synthetic rubber thin film in a plasma enhanced chemical vapor deposition reactor [J] . Gursoy Mehmet Journal of Applied Polymer Science . 2021,第3a4期

机译：血浆增强化学气相沉积反应器中合成橡胶薄膜的气相沉积聚合
2. Deposition of copper thin films by plasma enhanced pulsed chemical vapor deposition for metallization of carbon fiber reinforced plastics [J] . Guo Zheng, Sang Lijun, Wang Zhengduo, Surface & Coatings Technology . 2016,第Pta2期

机译：等离子体增强脉冲化学气相沉积法沉积铜薄膜，用于碳纤维增强塑料的金属化
3. Deposition of copper thin films by plasma enhanced pulsed chemical vapor deposition for metallization of carbon fiber reinforced plastics [J] . Guo Zheng, Sang Lijun, Wang Zhengduo, Surface & Coatings Technology . 2016,第Pta2期

机译：等离子体增强脉冲化学气相沉积法沉积铜薄膜，用于碳纤维增强塑料的金属化
4. Effects of plasma power and deposition pressure on the properties of the low dielectric constant plasma polymerized cyclohexane thin films deposited by plasma enhanced chemical vapor deposition [C] . C. Shim, J. Yang, Y.C. Quan, European conference on chemical vapor deposition . 2001

机译：等离子体功率和沉积压力对等离子体增强化学气相沉积沉积的低介电常数等离子体聚合环己烷薄膜的影响
5. The deposition of inorganic thin films on polymer substrates by plasma-enhanced chemical vapor deposition. [D] . Guerin, Daniel Christian. 2001

机译：通过等离子增强化学气相沉积在聚合物基材上沉积无机薄膜。
6. Effect of Sample Elevation in Radio Frequency Plasma Enhanced Chemical Vapor Deposition (RF PECVD) Reactor on Optical Properties and Deposition Rate of Silicon Nitride Thin Films [O] . Mateusz Œmietana, Robert Mroczyński, Norbert Kwietniewski 2014

机译：射频等离子体增强化学气相沉积（RF PECVD）反应器中样品高度对氮化硅薄膜光学性能和沉积速率的影响
7. DEVELOPMENT OF PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION REACTOR FOR PREPARATION OF OXYGEN CONTAINING ORGANOSILAZANE POLYMER THIN FILMS [O] . Roman PŘIBYL, Štěpánka KELAROVÁ, Vojtěch HOMOLA, 2020

机译：血浆增强化学气相沉积反应器的研制制备含氧有机吡嗪聚合物薄膜的制备

Mass Transport Characteristics in a Pulsed Plasma Enhanced Chemical Vapor Deposition Reactor for Thin Polymer Film Deposition

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