Surface Functionalization of Ultrananocrystalline Diamond Thin-Films: Toward Biomedical Devices

摘要

There has been a growing interest in using hard carbon thin-films, diamond based materials in particular, as impervious coatings for Si based biomedical microelectromechanical systems (bioMEMS). Diamond materials, well known for their high mechanical and chemical robustness and low permeability, are also biocompatible and bioinert, able to fulfill rigorous biocompatibility and long-term operation stability requirements for biomedical devices.