Bonding in ion-implanted carbon films characterized by TEM spectrum lines and energy-filtered imaging

摘要

Ion-implanted diamond-like carbon (DLC) films have been characterized by techniques based on electron energy-loss spectrometry using an imaging energy filter on a 300kV TEM. Nitrogen implantation results in increased sp{sup}2 bonding and a 1.3 eV shift to higher binding energies for carbon-K. Argon implantation results in a smaller increase in sp{sup}2 bonding with no detectable binding energy shift. The fraction of implanted species retained is much smaller for Ar than for N. Differences in behavior between N- and Ar-implanted DLC are consistent with expected chemical reactions. Preliminary results demonstrate the feasibility of mapping the π{sup}*/ σ{sup}* intensity (sp{sup}2 / sp{sup}3) ratio by energy-filtered TEM as an alternative to spectrum imaging in STEM mode.