MEMS/MOEMS Application to Optical Communication

摘要

The paper describes brief summary of current MES(micro electro mechanical systems) technology and its application to optics. The optical application is one of the most important applications of MEMS because of two reasons; one is that the micromachine technology can provide high performances and new functionalities for optical systems and the other is that those optical microsystems can satisfy market demands for optical communication networks, displays,data storage and sensors. Opportunities for MEMS-based devices in optical communication networks are discussed. Some specific examples of MEMS optical switches are described.