LTCC is applicable to a broad range of micro systems. New LTCC techniques for micro-IMS fabrication have improved function, while simplifying the structure for better manufacturability at lower cost, which is critical to widespread implementation of robust sensing capability. A drift tube is fabricated by rolling unfired glass-ceramic tape with thick film features on both sides, including internal electrodes, external connections, seal rings, a buried heater, and an integral precision resistor network. The tube supports itself mechanically through burnout and firing. The assembly of internal components, including an ionizer, apertures, grids, and a target, is accomplished from the tube ends. The high aspect ratio of LIGA grids accomplishes low obstruction with high axial rigidity. Gas plumbing is also incorporated, and a sacrificial material technique which simplifies the exhaust porting is described. Integral transparent windows in LTCC as they may improve a future IMS are also described. Prototypes have detected ion peaks.
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