Thermal and Mechanical Properties of SU8 Negative Photoresist Coatings

机译：SU8负光致抗蚀剂涂层的热和力学性能

获取原文

获取外文期刊封面目录资料

页面导航

摘要
著录项
引文网络
相似文献
相关主题

摘要

Being first developed by IBM in 1989,SU8 is an epoxy-based resist designed specifically for ultrathick,high-aspect-ratio Micro-Electrical Mechanical Systems (MEMS) type applications.Several important properties of SU8 make it suitable for such applications.

机译：SU8是由IBM开发的首次开发，SU8是一种专为超ick，高纵横比微电电机系统（MEMS）型应用而设计的环氧基抗蚀剂。SU8的重要特性使其适用于这些应用。

著录项

来源
《American Chemical Society Division of Polymeric Materials:Science and Engineering Meeting》|2001年||共2页
会议地点
作者
Ru Feng; Richard J.Farris;
展开▼
作者单位

展开▼
会议组织
原文格式 PDF
正文语种
中图分类聚合类树脂及塑料;
关键词

相似文献

外文文献
中文文献
专利

1. Influence of processing conditions on the thermal and mechanical properties of SU8 negative photoresist coatings [J] . Feng R., Farris RJ. Journal of Micromechanics and Microengineering . 2003,第1期

机译：加工条件对SU8负性光刻胶涂层热力学性能的影响
2. The characterization of thermal and elastic constants for an epoxy photoresist SU8 coating [J] . Feng R., Farris RJ. Journal of Materials Science . 2002,第22期

机译：环氧光刻胶SU8涂层的热常数和弹性常数的表征
3. The characterization of thermal and elastic constants for an epoxy photoresist SU8 coating [J] . R. Feng, R. J. Farris Journal of Materials Science . 2002,第22期

机译：环氧光刻胶SU8涂层的热常数和弹性常数的表征
4. Thermal and Mechanical Properties of SU8 Negative Photoresist Coatings [C] . Ru Feng, Richard J.Farris American Chemical Society Division of Polymeric Materials:Science and Engineering Meeting . 2001

机译：SU8负光致抗蚀剂涂层的热和力学性能
5. The relation of material properties, residual stresses, and thermal and mechanical loadings to coating degradation in thermal barrier coatings and tungsten carbide thermal spray coatings. [D] . McGrann, Roy Thomas Rumsey. 1997

机译：在隔热涂层和碳化钨热喷涂涂层中，材料性能，残余应力以及热载荷和机械载荷与涂层降解之间的关系。
6. Influence of Calcium Silicate and Hydrophobic Agent Coatings on Thermal Water Barrier Mechanical and Biodegradation Properties of Cellulose [O] . Saravanan Chandrasekaran, Remi Castaing, Alvaro Cruz-Izquierdo, 2021

机译：硅酸钙和疏水剂涂层对纤维素热水屏障机械和生物降解性能的影响
7. Dynamic thermal mechanical characterization of Epoclad negative photoresist for micro mechanical structures [O] . Wouters Kristof, Puers Robert 2009

机译：用于微机械结构的Epoclad负性光刻胶的动态热力学表征

Thermal and Mechanical Properties of SU8 Negative Photoresist Coatings

摘要

著录项

引文网络

相似文献

相关主题

期刊订阅