A New Combinatorial Experimental Method for Preparation of PZT Thin Films from Pb, Zr and Ti Metal Organic Chemical Sauces

摘要

In order to develop a combinatorial synthesis process for the preparation of thin films from the metal organic chemical sauces, we tried to fabricate Pb(Zr_x/Ti_(1-x))O_3 (PZT) thin films from PT (Pb and Ti) and PZ (Pb and Zr) organic chemical sauces. The PT and PZ solutions were spin-coated onto a Pt/Ti/SiO_2/Si substrate layer by layer in different sequences and concentrations, and then the post-annealing was carried out in order to obtain homogenized PZT thin film. Characterizations of the structure, composition and ferroelectric property of the samples were performed by XRD, SEM, XRF, and the P-E hysteresis measurement system. It was found that a homogeneous PZT thin film with single perovskite structure could be obtained without post-annealing treatment if the PZ and PT concentrations were below 0.025M. When the concentrations of PZ and PT were higher than 0.05M, the other phases could be observed besides the PZT phase, even the post-annealing temperature were up to 600°C for more than 14 days. The composition of the PZT films is controllable by changing the ratio of the PZ and PT in the multi-layers. It is concluded that this method could be used to study the other thin film materials.