Fabrication and Characterization of Thin Films in BaO-SrO-TiO_2 System Produced by a photochemical Metalorganic Deposition Process

摘要

The inclusion of metal oxides and mixed metal oxides processing higher dielectric constants than more traditional insulators such as silicon oxide into microelectronic devices is currently an important topic in a variety of areas.For example,the inclusion of embedded passive devices such as capacitors into printed wiring boards (PWB) is currently of considerable importance in the field of packaging technology for system-on- package (SOP) applications.