DEVELOPMENT OF A FULL-SCALE AND REDUCED SEMICONDUCTOR MANUFACTURING MODEL FOR ADVANCED INPUT CONTROL AND BOTTLENECK QUEUING

摘要

A full-scale model of a semiconductor manufacturing plant was generated from a SEMATECH dataset using the computer software development package Extend~(TM). A reduced model was also generated to capture the essence of the full-scale model while leaving behind the cumbersome simulation times. The reduced model was used to develop strategies for input control and bottleneck queuing policies. Through various simulations using different input release policies and bottleneck scheduling strategies we were able to show improvements over the standard deterministic input release policy and the often practiced daily release of lots. Workload regulating input release based on the amount of system WIP (work in process) reduced the product cycle times from the previously mentioned input release policies. Mandating preventative maintenance on the bottleneck machine when the system WIP was low also decreased the product cycle and system WIP for a deterministic input release policy.