FILM THICKNESS EFFECT ON ELECTROCHEMICAL PROPERTIES OF SPUTTERED Li_5Mn_2O_4 THIN FILMS

摘要

The thin film rechargeable microbattery,serving as an independent power supply in micro-electro-mechanical systems (MEMS) and a backup source for electronic circuits,has been given much attention[1].The major difficulty in fabricating a microbattery is to prepare layers of electrodes in thickness less than one micrometer by using processes compatible with the microelectronics fabrication techniques.During cycling,neither the electrode nor the electrolyte materials should undergo a morphology change that might lead to the formation of chemically unstable,high surface area materials,even at the high rate of cycling desirable in some on-chip microbattery applications.The fabrication of such a multilayer system would allow integration of power units for MEMS.In this work,lithium manganese oxide was deposited using a rf magnetron sputter and the effect of film thickness on its microstructure,surface morphology,and electrode characteristics was investigated.