FABRICATION OF SMOOTH LOW STRESS AMORPHOUS CARBON MICRO-STRUCTURES BY PHOTOLITHOGRAPHY AND WET KOH ETCHING

摘要

The amorphous carbon films prepared by filtered cathodic vacuum arc (FCVA) deposition system are superior in nature with very smooth surface morphology,relatively high hardness,exceptional tribological behaviour and excellent bio-compatibility [1].These exceptional qualities make them suitable for many device applications.However,these superior quality films prepared at relatively lower substrate bias such as -80V exhibits high compressive stress [1].