Thermal decomposition of Ru(EtCp)_2 and metallorganic chemical vapor deposition of Ruthenium thin films using Ru(EtCp)_2

摘要

The metallic ruthenium films were prepared by metalorganic chemical vapor deposition using Ru(EtCp)_2 precursor in various atmosphere.The thermal decomposition behavior of Ru(EtCp)_2 was studied using thermogravimetry and infrared and mass spectroscopy.Particularly,the dissociation of the chemical bonds in the complex ligand was monitored from the IR spectra of the complex under O_2 and Ar atmosphere while the sample was heated.The chemical bonds in the complex ligand were dissociated sequentially at elevated temperatures.Ambient gases significantly had an effect on the IR patterns of the complex.Oxygen gas influenced decreasing dissociation temperature of chemical bonds in the complex.