STRUCTURE STABILITY IN PLASMA CHEMISTRY

摘要

Diamond is a metastable phase, while graphite is a stable phase in low pressure equilibrium phase diagrams of carbon. However, diamond with saturated structure of a bonds is more stable than graphite with unsaturated structure of n bonds during the existence of activated particles generated by plasma. That provides an excellent explanation for the plasma and other activated CVD diamond growth under low pressure taking place with simultaneous graphite etching.