ELECTRODE SURFACE MATERIALS AND STRUCTURES FOR PLASMA CHEMISTRY

摘要

The present disclosure provides for a plasma system, which includes a plasma device, an ionizable media source, and a power source. The plasma device includes an inner electrode and an outer electrode coaxially disposed around the inner electrode. At least one of the inner electrode and the outer electrode is formed from a metal alloy and includes a dielectric coating covering at least a portion thereof. The ionizable media source is coupled to the plasma device and is configured to supply ionizable media thereto. The power source is coupled to the inner and outer electrodes and is configured to ignite the ionizable media at the plasma device to form a plasma effluent.