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Influence of Substrate Temperature on Multilayer Thin Film Growth, Charge Carrier Injection and Efficiency of OVPD-Processed Organic Light Emitting Diodes

机译:基板温度对多层薄膜生长的影响,电荷载体注入和OVPD加工有机发光二极管的效率

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Organic light emitting diodes (OLED) have great potential for future lighting applications. At present, most OLED intended for lighting are processed by vacuum thermal evaporation (VTE). Organic vapour phase deposition (OVPD) is a more elaborate process than VTE, but allows to fabricate devices with innovative stack designs as for example mixed layers with varying compositions. In order to control the OVPD process such that efficient and long-living devices can be achieved, detailed knowledge about the influence of the substrate temperature, gas flows and deposition chamber pressure on the film and interface formation is crucial. In this work, we present a study on the influence of the substrate temperature in the OVPD process on the morphology of all individual layers of a red phosphorescent OLED as well as on the electro-optical properties of the complete device. All samples have been deposited employing AIXTRON OVPD systems. The surface roughness of all layers of the investigated OLED was shown to depend strongly on the substrate temperature during the evaporation process. However, by choosing suitable substrate temperatures, the RMS roughness of all layers could be reduced to less than 1.1 nm. Furthermore, it is shown that the substrate temperature has a great influence on the I-V characteristics of the hole injection layer and hole transport layer. Based on the obtained results, an optimized substrate temperature profile could be tailored for the investigated OLED and therefore its luminous efficacy was increased significantly compared to reference OLED which were processed at a constant substrate temperature.
机译:有机发光二极管(OLED)对未来的照明应用有很大的潜力。目前,大多数用于照明的OLED通过真空热蒸发(VTE)加工。有机气相沉积(OVPD)是比VTE更精细的过程,但允许制造具有创新堆叠设计的装置,例如具有不同组合物的混合层。为了控制OVPD过程,使得能够实现高效和长生物的装置,详细了解基板温度,气体流动和沉积室压力对膜和界面形成的影响是至关重要的。在这项工作中,我们展示了OVPD过程中基板温度对红色磷光OLED的所有单层形态的影响以及完整装置的电光特性。所有样品均已沉积使用Aixtron OVPD系统。所研究的OLED的所有层的表面粗糙度显示在蒸发过程中强烈依赖于衬底温度。然而,通过选择合适的基板温度,所有层的均方根粗糙度可以降低至小于1.1nm。此外,示出基板温度对空穴注入层和空穴传输层的I-V特性具有很大影响。基于所得的结果,可以针对所研究的OLED定制优化的底物温度曲线,因此与在恒定衬底温度下加工的参考OLED相比,其发光功效显着增加。

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