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Leds based on oxidized porous polysilicon on a transparent substrate

机译:基于透明基材上氧化多孔多晶硅的LED

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Light emitting devices (LEDs) based on porous polysilicon (PPS) have been fabricated on a transparent quartz substrate. Several structures have been developed, each consisting of a backside contact (ITO or p~+ polysilicon), a light emitting PPS layer, a capping layer, and a metal top contact. Photoluminescence (PL) from PPS is similar to that of etched crystalline Si, peaking near 750 nm and showing degradation during 515 nm laser excitation with intensity <100 mW/cm~2. This degradation disappears if PPS is oxidized after formation. Visible electroluminescence (EL) has been achieved in both oxidized and non-oxidized PPS devices with voltages under 10 V and current densities <200 mA/cm~2.
机译:基于多孔多晶硅(PPS)的发光器件(LED)已经在透明的石英底物上制造。已经开发了几种结构,每个结构由背面触点(ITO或P〜+多晶硅)组成,发光PPS层,覆盖层和金属顶部接触。来自PPS的光致发光(PL)类似于蚀刻结晶Si,达到750nm的峰值,并且在515nm激光激发期间显示劣化,强度<100mW / cm〜2。如果在形成后PPS氧化,则这种降解消失。在10V和电流密度<200mA / cm〜2的电压下,在具有电压的氧化和非氧化PPS器件中已经实现了可见的电致发光(EL)。

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