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Microstructure and wear resistance of doped diamondlike carbon prepared by pulsed laser deposition

机译:脉冲激光沉积制备掺杂金刚石碳的微观结构和耐磨性

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We have investigated the microstructure and tribological properties (were resistance) of diamond-like carbon (DLC), DLC doped with Cu and DLC doped with Ti deposited by a sequential pulsed laser ablation of two targets onto Si(100) substrates. The composition of these films was determined by Rutherford backscattering spectroscopy and X-ray photoelectron spectroscopy (XPS). Raman spectroscopy and detailed analysis of the electron diffraction patterns of the films showed typical features of DLC with a structure dominated by sp~3 bonded carbon Wear resistance measurements made on these samples by means of the "crater grinding method" showed that DLC+2.75
机译:我们研究了金刚石状碳(DLC)的微观结构和摩擦学特性(耐药性),DLC掺杂有Cu和DLC掺杂有沉积的Ti,其通过顺序脉冲激光烧蚀两种靶标在Si(100)基板上。这些薄膜的组成由Rutherford反向散射光谱和X射线光电子谱(XPS)测定。拉曼光谱和对薄膜的电子衍射图案的详细分析显示DLC的典型特征,其具有由SP〜3键合的碳耐磨性测量的结构,通过“火山口研磨方法”显示DLC + 2.75

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