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A field emission study of the critical parameters of amorphous carbon films deposited on a variety of carbonaceous substrates

机译:各种碳质基材沉积的无定形碳膜临界参数的场发射研究

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The field emission properties of a variety of nitrogen-containing hydrogenated amorphous carbon films have been characterised as a function of film thickness and substrate type. Identified trends have been discussed in terms of the optical band-gap and refractive index of the films, and the surface roughness of the substrates. In addition, carbon-based materials have been considered as inexpensive film-compatible substrates, and an in-situ oxygen plasma pre-treatment has been investigated as a means of changing the field enhancement factor of the system. We have achieved field emission with threshold voltages as low as 8 V mu m~(-1), and we present data that supports the view that the electron emission from amorphous carbon is dependent on the nature of the back contact, and possibly the ease at which the film can be fully depleted, i.e. film thickness.
机译:已经表征了各种含氮氢化非晶碳膜的场排放性能作为膜厚度和基材类型的函数。已经在膜的光带间隙和折射率的方面讨论了所确定的趋势,以及基板的表面粗糙度。此外,碳基材料被认为是廉价的膜兼容衬底,并且已经研究了原位氧等离子体预处理作为改变系统的现场增强因子的方法。我们已经实现了阈值电压的场发射,阈值电压低至8 V mu m〜(--1),我们呈现支持无定形碳的电子发射的视图取决于背面接触的性质,并且可能是易于的薄膜可以完全耗尽,即膜厚度。

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