LiCoO_2 thin films grown by pulsed laser deposition on low cost substrates

摘要

We report on the use of pulsed laser deposition (PLD) to grow thin films lf LiCOO_2 on a number of low cost substrates including SnO_2 coated Upliex, stainless steel and SnO_2 coated glass. Highly textured (001) films grown on CVD deposited SnO_2 films on 7059 glass were obtained at 200 to 500 mTorr O_2 and a temperature of 500 C. Similar texture was not obtained on the stainless or Upilex however dense films from crystalline to amorphous were obtained. The films were characterized y x-ray diffraction and Raman spectroscopy.