Use of resonance-enhanced multiphoton ionization (REMPI) for probing hydrogen atoms in diamond chemical vapor deposition using a hot filament reactor

摘要

We illustrate advantages of H atom multiphoton ionization spectroscopy, resonance enhanced at the two photon energy by the 2s$+1$/. $+2$/S$-1/2$/ state, as a means of obtaining spatially resolved, relative H atom concentrations and gas temperature profiles within a hot filament CVD reactor, and investigating the way in which these parameters depend on process conditions.