This paper focuses on enabling effective fabrication of three-dimensional (3D) micro-scale features on ceramics by synergistically combining green micromachining (GMM) and powder injection molding (PIM) processes. The PIM process involves creating a mixture of powdered ceramic with a polymer binder, molding the mixture into a shape, debinding to remove the binder, and sintering to obtain the final solid product. The GMM process refers to the use of micro-scale milling and drilling tools to create 3D shapes on green compacts obtained after the molding step during PIM. Following GMM, parts are debound and sintered to obtain the final part with micro-scale features. The rationale for combining the two processes is the elimination of barriers to micro-molding of defect free micro-structures with complex geometries through application of micromachining at the green stage. As representative high-impact ceramics, AlN and SiC were used for experimental analyses. This work presents a rapid, predictable, reproducible, low cost, and accurate production of ceramic parts with micro-scale features.
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