The paper presents a new parallel micromanipulator that is composed of three piezohydraulic actuation Systems. The basic elements of the actuation system are a piezoelectric actuator, a bellows and hydraulic oil. The use of the flexible bellowsresults in a new type of parallel structure, where the joints are integrated into actuator links. The joint free tripod-like micromanipulator is controlled using a real-time control software that is based on a multi-level architecture. Control isorganized in four levels for non-linearity compensation, position feedback control, supervision and tackling of automatic operations. The presented micromanipulator provides an exceptional combination of submicrometer resolution, large work space,miniature size and advanced control.
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