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HIGH TEMPERATURE X-RAY DIFFRACTION STUDY OF PbTiO_3 THIN FILMS GROWN ON MgO(001) BY MOCVD

机译:MgO(001)上生长的PBTIO_3薄膜的高温X射线衍射研究MoCVD

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Lead titanate (PT) is ferroelectric in its tetragonal phase (c/a=1.06). The domain formation is coupled to the relaxation of internal stress generated by a combination of lattice mismatch, transformation strain and differential thermal stress. The mechanism of domain formation in an epitaxially grown PT film is related to the substrate type and the growth temperature. In this study, PT films have been deposited on MgO(001) in a cold-wall, horizontal metal organic chemical vapor deposition (MOCVD) system. The structure of domains and their evolution have been measured as a function of temperature by the x-ray diffraction method using a hot stage. Domain structure changes were observed by #theta#-2#theta# scans, #omega# scans, as well as in-plane #phi# scans. Effect of film stress on the ferroelectric transition temperature is discussed. Reproducibility of domain formation as a result of temperature cycling both below and above T_c is assessed.
机译:铅钛酸盐(Pt)是铁四方相的铁电(C / A = 1.06)。畴形成耦合到通过格子错配,转化应变和差动热应力的组合产生的内应力的弛豫。外延生长的Pt膜中的结构域形成机制与基材类型和生长温度有关。在该研究中,PT膜已经在冷壁,水平金属有机化学气相沉积(MOCVD)系统中沉积在MgO(001)上。通过使用热阶段的X射线衍射法测量结构域及其进化的结构。通过#theta#-2#theta#扫描,#ommega#扫描以及在线#ppi#scans,观察到域结构更改。讨论了膜应力对铁电转变温度的影响。评估作为温度循环的域形成的域形成的再现性,并评估T_C的温度。

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