Microsystem CAD

摘要

Microsystem technology, which includes semiconductor technology, together with current design methods determine the user requirements of μTCAD tools aimed at microsystem developers. The choice of numerical methods and computer technology complete the specification. In this paper we present a μTCAD system, and show how it is broken up into tasks, individual programs that make up the functional building blocks. Many of these blocks already exist, organised within the μTCAD system and centred around our microsystem simulation kernel SOLIDIS. We illustrate these functional blocks with concrete examples. We conclude by considering the missing links in the μTCAD chain.