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Performance trade-offs for a surface micromachined microengine

机译:表面微机械型微发炎的性能权衡

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An electromechanical model of Sandia's microengine is developed and applied to quantify critical performance tradeoffs. This is done by determining how forces impact the mechanical response of the engine to different electrical drive signals. To validate the theoretical results, model- based drive signals are used to operate actual engines, where controlled operation is achieved for the following cases: 1) spring forces are dominant, 2) frictional forces are dominant, 3) linear inertial forces are dominant, 4) viscous damping forces are dominant, and 5) inertial load forces are dominant. Significant improvements in engine performance are experimentally demonstrated in the following areas: positional control, start/stop endurance, constant speed endurance, friction load reduction,and rapid actuation of inertial loads.
机译:开发并应用了桑迪亚微通知的机电模型,以量化关键性能权衡。这是通过确定力如何影响发动机的机械响应到不同的电驱动信号来完成的。为了验证理论结果,基于模型的驱动信号用于操作实际的发动机,其中对以下情况实现的受控操作:1)弹簧力是显性的,2)摩擦力是显性的,3)线性惯性力是显性的, 4)粘性阻尼力是显性的,并且5)惯性负载力是显性的。发动机性能的显着改进在以下领域进行了实验证明:位置控制,开始/停止耐久性,恒定速度,摩擦负荷减小,以及惯性载荷的快速致动。

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