Development and manufacturing of a two-dimensional microactuator for moving of an optical fibre

摘要

This paper describes the design, fabrication and testing of an electrodynamical microactuator for moving an optical fibre. This device with two degrees of freedom has a motion range of 200 μm. It is used for the alignment of optical fibres in the sub-micrometer range. The positioning of a monomode optical fibre with respect to one or several other optical fibres or an optical chip is possible. As a result of the electrodynamic principle the motion is free of slide and friction. The technologies of wet chemical etching of silicon and galvanic batch-processes are used. The magnetic field is generated by a permanent magnet. Around the magnet surface copper coils are built for the deflection of the magnet in two dimensions.