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Equilibrium elasto-hydrodynamic analysis in wafer slicing process using wiresaw

机译:晶圆切割工艺平衡弹性流体动力学分析使用线材锯

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An improved elasto-hydrodynamic (EHD) model of wiresaw slicing process is summarized in this paper which incorporates the equation of equilibrium for the motion of the wire. Parametric studies are conducted, which encompass different cases in the wiresaw slicing process. Based on the results, we examine the effects of wire bow angle on the EHD properties and the slicing mechanism of wiresaw process. The simulation results provide insights to the wiresaw slicing mechanism, and suggest ways to facilitate the experimental study for industry wiresaw slicing.
机译:本文总结了一种改进的线锯切片工艺的ELASTO-液动力学(EHD)模型,其包括用于线的运动的平衡方程。进行参数化研究,它在线切片过程中包含不同的情况。基于结果,我们研究了线弓角对电线工艺的EHD性能的影响和线路工艺的切片机构。仿真结果为线材切片机制提供了见解,并提出了促进工业线锯切割实验研究的方法。

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