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CARBON NANOTUBE REINFORCED WIRESAW BEAM USED IN WIRESAW SLICING OF INGOTS INTO WAFERS
CARBON NANOTUBE REINFORCED WIRESAW BEAM USED IN WIRESAW SLICING OF INGOTS INTO WAFERS
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机译:碳纳米管增强的钢丝锯条,用于将钢丝锯切成薄片
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摘要
A kind of device for scroll saw beam is from the chips of slicing silicon ingots, such as semiconductor wafer or the polycrystalline silicon ingot casting from single crystal rod. The scroll saw beam can include thermoset polymer resin and carbon nanotube by polymer composites.
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