This work characterizes parallel-plate actuators foroscillations near the mechanical resonant frequency andamplitudes comparable to the actuator gap. Specifically, we showthat at resonance, the structure can move beyond the well-knownpull-in-limit but is instead limited to 56% of the gap by “resonantpull-in.” Above the resonant frequency, the structure is not limitedby pull-in and can theoretically oscillate across the entire gap. Wedevelop a describing function model, which includes an amplitudedependentmodel for electrostatic spring tuning, to predict thesteady-state frequency response. These results are verifiedexperimentally.
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