We have designed analog tunable diffractive gratings withperiod tunable to within fraction of a nanometer and diffractedangular changes on the order of 1 μradian. We deform the gratingsin both electrostatic and piezoelectric actuator designs, anddemonstrate period changes of order 2 nm, with limitation frommeasurement noise. Fabrication processes and results arepresented. Actuator characterization and experimentalmeasurements for both devices suggest applications in opticaltelecommunications and microspectroscopy.
展开▼
