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Fabrication of diffractive optical elements by direct laser-writing with circular scanning

机译：用圆形扫描的直接激光写入衍射光学元件的制造

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摘要

A new circular laser writing system for fabrication of computer generated holograms is described. The results of diffractive element synthesis without photoresists usage are presented.

机译：描述了一种用于制造计算机产生全息图的新型激光书写系统。介绍了没有光致抗蚀剂使用的衍射元素合成的结果。

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《Image Processing and Computer Optics》|1995年||共8页
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Voldemar P. Koronkevich; V.P. Kiryanov; V.P. Korolkov; Alexander G. Poleshchuk; V.V. Cherkashin; Evgeny G. Churin; A.A. Kharissov;
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中图分类自动化技术、计算机技术;
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专利

1. Fabrication of curved diffractive optical elements by means of laser direct writing, electroplating, and injection compression molding [J] . Roeder M., Thiele S., Hera D., Journal of Manufacturing Processes . 2019,第Nova期

机译：通过激光直接写入，电镀和注压成型法制造弯曲衍射光学元件
2. FABRICATION OF MONOLITHIC DIFFRACTIVE OPTICAL ELEMENTS BY THE USE OF E-BEAM DIRECT WRITE ON AN ANALOG RESIST AND A SINGLE CHEMICALLY ASSISTED ION-BEAM-ETCHING STEP [J] . Daschner W., Lee SH., Larsson M. Applied optics . 1995,第14期

机译：通过在模拟抗蚀剂上使用电子束直接写法和单一化学辅助离子束刻蚀步骤来制造单质衍射光学元件
3. Fabrication of spiral-phase diffractive elements using scanning-electron-beam lithography [J] . Hsin-Yu Tsai, Henry I. Smith, Rajesh Menon Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures . 2007,第6期

机译：扫描电子束光刻技术制备螺旋相衍射元件
4. Fabrication of diffractive optical elements by direct laser-writing with circular scanning [C] . Voldemar P. Koronkevich, Institute of Automation, Electrometry, 5th International Workshop on Digital Image Processing and Computer Graphics (DIP-94) . 1995

机译：通过圆形扫描直接激光写入来制造衍射光学元件
5. Design and fabrication of surface relief diffractive optical elements, or kinoforms, with examples for optical athermalization. [D] . Londono, Carmina. 1992

机译：表面浮雕衍射光学元件或kinoform的设计和制造，并附有光学无热化的示例。
6. A Computational Design Framework for Efficient Fabrication Error-Tolerant Planar THz Diffractive Optical Elements [O] . Sourangsu Banerji, Berardi Sensale-Rodriguez -1

机译：高效耐制造误差的平面太赫兹衍射光学元件的计算设计框架
7. Influences on the Fabrication of Diffractive Optical Elements by Injection Compression Molding [O] . Marcel Roeder, Peter Schilling, Daniel Hera, 2018

机译：喷射压缩成型对衍射光学元件的制造影响

Fabrication of diffractive optical elements by direct laser-writing with circular scanning

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