声光调制器在激光直接写入系统中的应用

摘要

介绍了声光调制器的光强调制原理及声光调制器在激光直接写入设备中实现光强稳定、连续可调的理论和设计．该声光调制器采用钼酸铅晶体作为声光介质，并给出了具体的结构参数．该系统曝光所能达到的最小线宽为0．6 μm．%The principle of acoustooptical modulator is given. The theoretical analysis and design methods for stabilizing and continual modulating laser beam intensity are carried out. The PbMoO4 is used as acoustooptical material, and the structure parameter of acoustooptical modulator is presented. The width of the finest line we get is 0. 6 μm.