Laser holography is a very promising technique for HTS thin film patterning. It gives us the possibility to produce the whole picture on a film by one laser pulse. By using this technique we fabricated an 8-turn spiral coil with 10 mkm linewidth. In the case of front side interaction the laser beam caused modification (transformation to nonsuperconducting state) of the irradiated parts of the film, in the case of backside interaction the laser beam passed through a transparent substrate and caused accurate removal of the irradiated parts of the film. Our calculations show that the temperature which arises in the film at these energy densities is significantly below the melting temperature of YBCO material. Possible mechanisms of this backside removal are discussed.
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