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首页> 外文期刊>Optics Letters >Holographic patterning of graphene-oxide films by light-driven reduction
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Holographic patterning of graphene-oxide films by light-driven reduction

机译:通过光驱动还原对氧化石墨烯薄膜进行全息构图

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We report on the patterning and reduction of graphene-oxide films by holographic lithography. Light reduction can be used to engineer low-cost graphene-based devices by performing a local conversion of insulating oxide into the conductive graphene. In this work, computer-generated holograms have been exploited to realize complex graphene patterns in a single shot, different from serial laser writing or mask-based photolithographic processes. The technique has been further improved by achieving speckle noise reduction: submicron and diffraction-limited features have been obtained. In addition we have also demonstrated that the gray-scale lithography capability can be used to obtain different reduction levels in a single exposure.
机译:我们通过全息光刻报道了氧化石墨烯膜的图案化和还原。通过执行绝缘氧化物到导电石墨烯的局部转换,可以使用减光技术来设计低成本的石墨烯基器件。在这项工作中,已利用计算机生成的全息图以单次实现复杂的石墨烯图案,这与串行激光写入或基于掩模的光刻工艺不同。通过降低斑点噪声,该技术得到了进一步的改进:已经获得了亚微米和衍射限制的功能。另外,我们还证明了灰度光刻能力可用于在单次曝光中获得不同的还原度。

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