Determination of optical constant of diamond thin films

摘要

Refractive index N, extinction coefficient k, and surface roughness $alpha of synthetic diamond thin films are strongly dependent on the growth process. The current presentation describes a multiparameter optical transmittance curve fitting method to determine refractive index n, extinction coefficient k, thickness t, and surface roughness $alpha of synthetic CVD diamond thin films taking account optical scattering of the light by the coating surface. All the data in this method, instead of extreme values in the conventional enveloped method, of IR transmittance curve are used to fit the above properties of diamond films in a short time by specially developed computer software. The accuracy of determination can be improved.