Thin-film selective multishot ablation at 248 nm

摘要

Excimer laser ablation of multi-layered films was studied using the photoacoustic mirage effect technique. Layered systems of a polymer-metal-SiO$-2$/ type was investigated for various metals between 0.5 and 2 J/cm$+2$/. Significant changes in the deflection signal were found when the ablation passed the interface between subsequent layers. This effect can be used to distinguish between different materials and is therefore suited for an in situ control of pulsed laser processing.