Laser Ablation of Aluminum at 193, 248 and 351 nm

摘要

Pulsed laser ablation of an aluminum target at 193,248 and 351 nm has beeninvestigated by laser induced fluorescence (LIF) spectroscopy. Velocity distributions of the ablated Al atoms have been measured directly by monitoring their flight times from the target to the probe laser beam, and by Doppler laser spectroscopy. The velocity distributions resulting from the three wavelengths can all be characterized as hyperthermal, with average velocities of between 4.5 x 10 to the fifth power cm/s and 6.5 x 10 to the fifth power cm/s over a fluence range of 0.3-6.5 J/cm2. Average values of the Al atom distribution can also be derived by measuring the AlO internal energy distribution of the hot Al atom reaction with low pressures of O2.